A reliable and cost-effective solution for CMP slurry and high-purity chemical distribution systems. An innovative diaphragm design maximizes stroke, enabling a very high flow rate with a small footprint.
- Unique internal radius enables a fully swept, increased flow path, decreased pressure drop and reduced shear
- All wetted parts are PFA and PTFE, external parts are PVDF, providing higher chemical resistance and reliability
- No external metal parts and no metals in secondary containment chamber means lower contamination potential in the event of a media leak or exposure to harsh external environments
- External, nonwetted components are available in ECTFE material for higher chemical resistance to oxygenated solvents and bases
CMP漿料和高純度化學品分配系統的可靠且經濟的解決方案。創新的隔膜設計使沖程最大化，以較小的占地面積實現非常高的流量。獨特的內半徑可實現完全吹掃、增加流路、降低壓降和減少剪切。所有潤濕部件為PFA和PTFE，外部部件為PVDF，提供更高的耐化學性和可靠性。無外部金屬部件和二級密封室中無金屬意味著在介質泄漏或暴露于惡劣外部環境的情況下污染可能性更低。外部非潤濕部件可用于ECTFE材料，對氧化溶劑和堿具有更高的耐化學性
Port ConnectionFlow Factor CVFlow Factor KVABCD3/4" Flaretek16.795.75.27" (133.9 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)3/4" Super 300 Type Pillar fitting6.795.75.25" (133.4 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)3/4" PrimeLock6.795.75.92" (150.4 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)3/4" PureBond8.2117.14.67" (118.6 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)1" Flaretek19.8140.05.74" (145.8 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)1" Super 300 Type Pillar fitting9.8140.05.75" (146.1 mm)1.04" (26.4 mm)4.31" (109.5 mm)4.61" (117.1 mm)1" PrimeLock9.8140.06.26" (159.0 mm)1.12" (28.4 mm)4.39" (111.5 mm)4.69" (119.2 mm)1" PureBond10.9155.74.67" (118.6 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)
